Two-connection three-way manual diaphragm valve
The valve body
316L VIM-VAR stainless steel body material for ultra high purity applications.
The inner surface roughness can reach Ra 5 μin, can completely clean the flow passage.
Combine two LD or HD series diaphragm valves into one for maximum flow through a common path.
Narrow the dead zone, and excellent degassing.
While maintaining the basic performance of the original valve, through the same or different combinations.
The most compact piping system can be designed.
You can choose the most suitable flow system, pipe configuration and connector type according to the pipe layout.
Can design and produce more than three special specifications of multi - link diaphragm valve.
The diaphragm
Cobalt-based Super Alloy (UNS R30003) provides high strength and corrosion resistance.
Optimal design, long service life.
The seat
The fully enclosed seating design has the following advantages:
Excellent anti-expansion and anti-pollution capability;
Improved helium leak test performance;
Very few pellets are produced;
Long service life.
The high cleaning assembly and packaging is suitable for the high purity semiconductor industry.
Every product comes out of the factory and is helium tested.
Technical Data
| Main Specifications |
| End connection specification |
| 1/4" | 3/8",1/2" |
| Coefficient of flow(Cv) |
| 0.22 | 0.7
|
| Maximum service pressure |
| The low pressure:300pisg(20.7bar);High pressure:3000pisg(207bar) |
| Operating temperature | PCTFE | -40°C-80°C(-40° F-176° F) |
| PEA, Vespel | -26°C-177°C(-15° F-350° F) |
| Leakage rate in valve body |
| 1x10⁻⁹ sccs He |
| Leakage rate of valve body |
| 1x10⁻⁹ sccs He |
| Class of product |
| level | BA | EP | SEP |
| Body material | SS316L | SS 316L VAR |
| Internal surface roughness | Ra 10 μ in | Ra 5 μ in |
| grinding | Mechanical grinding process | Electrolytic lapping |
| cleaning | Skim cleaning + precision cleaning |
| packaging | A single layer | double |
| Material of product |
| The valve body | SS 316L/A479, SS316L / VAR/SEMIF20-0305 |
| The diaphragm | Cobalt-based super alloy/ UNS R30003 |
| The seat | PCTFE, PFA,Vespel |
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