High pressure pneumatic diaphragm valve
The valve body
SUS316L VAR stainless steel double melting material for ultra-high purity applications.
The inner surface roughness can reach Ra 5 μin, can completely clean the flow passage:
The closure area is minimized;
Easy to purge;
Maximize traffic.
The diaphragm
Cobalt-based Super Alloy (UNS R30003) provides high strength and corrosion resistance.
Optimal design, long service life.
The seat
The fully enclosed seating design has the following advantages:
Excellent anti-expansion and anti-pollution capability;
Improved helium leak test performance;
Very few pellets are produced;
Long service life.
The high cleaning assembly and packaging is suitable for the high purity semiconductor industry.
Every product comes out of the factory and is helium tested.
Technical Data
| Main Specifications |
| End connection specification |
| 1/4" |
| Coefficient of flow(Cv) |
| 0.27 |
| Maximum service pressure |
| 300pisg(206bar) |
| Operating temperature | PCTFE | -40°C-80°C(-40° F-176° F) |
| PEA, Vespel | -26°C-177°C(-15° F-350° F) |
| Leakage rate in valve body |
| 1x10⁻⁹ sccs He |
| Leakage rate of valve body |
| 1x10⁻⁹ sccs He |
| Class of product |
| level | BA | EP | SEP |
| Body material | SS316L |
| SS 316LVAR |
| Internal surface roughness | Ra 10 μ in | Ra 5 μ in |
| grinding | Mechanical grinding process | Electrolytic lapping |
| cleaning | Skim cleaning + precision cleaning |
| packaging | A single layer | double |
| Material of product |
| The valve body | SS 316L/A479, SS316L / VAR/SEMIF20-0305 |
| The diaphragm | Cobalt-based super alloy/ UNS R30003 |
| The seat | PCTFE, PFA,Vespel |
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中文
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