Low pressure pneumatic diaphragm valve
The valve body
SUS316L VAR stainless steel double melting material for ultra-high purity applications.
The inner surface roughness can reach Ra 5 μin, can completely clean the flow passage:
The closure area is minimized;
Easy to purge;
Maximize traffic.
The diaphragm
Cobalt-based Super Alloy (UNS R30003) provides high strength and corrosion resistance.
Optimal design, long service life.
The seat
The fully enclosed seating design has the following advantages:
Excellent anti-expansion and anti-pollution capability;
Improved helium leak test performance;
Very few pellets are produced;
Long service life.
The high cleaning assembly and packaging is suitable for the high purity semiconductor industry.
Every product comes out of the factory and is helium tested.
Technical Data
Leakage rate of valve body
| Main Specifications |
| End connection specification |
| 1/4" | 3/8,1/2" | 3/4" |
| Coefficient of flow(Cv) |
| 0.27 | 0.7 | 1.7 |
| Maximum service pressure | 300pisg(20.6bar) |
| Operating temperature | PCTFE | -40°C-80°C(-40° F-176° F) |
| PEA, Vespel | -26°C-177°C(-15° F-350° F) |
| Leakage rate in valve body |
| 1x10⁻⁹ sccs He |
| 1x10⁻⁹ sccs He |
|
|
| Class of product |
| level | BA | EP | SEP |
| Body material | SS316L |
| SS 316LVAR |
| Internal surface roughness | Ra 10 μ in | Ra 5 μ in |
| grinding | Mechanical grinding process | Electrolytic lapping |
| cleaning | Skim cleaning + precision cleaning |
| packaging | A single layer | double |
| Material of product |
| The valve body | SS 316L/A479, SS316L / VAR/SEMIF20-0305 |
| The diaphragm | Cobalt-based super alloy/ UNS R30003 |
| The seat | PCTFE, PFA,Vespel |
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Language
中文
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